Aixtron G5 MOCVD Susceptors

VeTek Semiconductor is a leading Aixtron G5 MOCVD Susceptors manufacturer and innovator in China.We have been specialized in SiC coating material for many years.We offer a Aixtron G5 MOCVD Susceptors designed specifically for Aixtron G5 MOCVD reactor. This Aixtron G5 MOCVD Susceptors kit is a versatile and efficient solution for semiconductor manufacturing with its optimal size, compatibility, and high productivity.Welcome to inquiry us.

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Product Description

As the professional manufacturer, VeTek Semiconductor would like to provide you Aixtron G5 MOCVD Susceptors like Aixtron Epitaxy, epi susceptor, SiC coated graphite parts, TaC coated graphite parts, Solid SiC/CVD SiC, Quartz parts.Welcome to inquiry us.

Aixtron G5 is a deposition system for compound semiconductors. AIX G5 MOCVD uses a production customer proven AIXTRON planetary reactor platform with a fully automated cartridge (C2C) wafer transfer system. Achieved the industry's largest single cavity size (8 x 6 inches) and largest production capacity. It offers flexible 6 - and 4-inch configurations designed to minimize production costs while maintaining excellent product quality. The warm wall planetary CVD system is characterized by the growth of multiple plates in a single furnace, and the output efficiency is high.

VeTek Semiconductor offers a complete set of accessories for the Aixtron G5 MOCVD Susceptor system and Aixtron G5+ system, Aixtron G5 MOCVD Susceptors consists of these accessories:

Thrust Piece,Anti-Rotate	Distribution Ring	Ceiling	Holder, Ceiling, Insulated	Cover Plate,Outer
Cover Plate,Inner	Cover Ring	Disc	Pulldown Cover Disc	Pin
Pin-washer	Planetary Disc	Collector Inlet Ring Gap	Exhaust Collector Upper	Shutter
Supporting Ring	Support Tube

Aixtron G5 MOCVD Susceptor

CVD SiC Film Crystal Structure:

CVD SIC FILM CRASTAL STRUCTURE

Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Density	3.21 g/cm³
Hardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m^-1·K^-1
Thermal Expansion(CTE)	4.5×10^-6·K^-1