LED EPI Susceptor

VeTek Semiconductor is a leading supplier of TaC coatings and SiC coating graphite parts. We specialize in the production of cutting-edge LED EPI Susceptors, essential for LED epitaxy processes. With a strong focus on innovation and quality, we offer reliable solutions that meet the stringent requirements of the LED industry. Contact us today to discuss your inquiries and discover how our products can enhance your manufacturing processes.

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Product Description

As the professional manufacturer, we would like to provide you high quality LED EPI Susceptor.

VeTek Semiconductor's LED EPI Susceptor, a cutting-edge product designed for LED epitaxy growth processes. This high-quality susceptor serves as a wafer carrier for LED epitaxy, providing essential support and maintaining the growth of LED epitaxial wafers. With its exceptional features and advanced design, the LED EPI Susceptor ensures optimal performance and reliability throughout the epitaxy process.

Manufactured using premium high-temperature, the LED EPI Susceptor exhibits outstanding temperature tolerance and chemical stability. Its meticulously engineered design guarantees uniform contact and growth of epitaxial wafers while offering superior surface flatness and wear resistance. The susceptor's structure and dimensions are tailored to accommodate various epitaxial wafer sizes, accommodating different diameters and thicknesses with ease.

The LED EPI Susceptor incorporates excellent thermal conductivity, efficiently dissipating heat to maintain a stable growth temperature for epitaxial wafers. This crucial feature enhances process stability and consistency, ensuring consistent and high-quality LED growth.

To further enhance its performance, the LED EPI Susceptor is coated with a premium tantalum carbide (TaC) thin film. This coating provides exceptional high-temperature stability, chemical resistance, hardness, wear resistance, and improved thermal conductivity. The TaC coating significantly enhances the durability and reliability of the product, ensuring long-lasting and optimal performance.

VeTek Semiconductor's LED EPI Susceptor boasts seamless compatibility with various LED epitaxy equipment and processes, making it a versatile solution for diverse epitaxial wafer growth requirements. Delivering excellence and precision, the LED EPI Susceptor is the ideal choice for achieving reliable and efficient LED epitaxy processes.

Experience the epitaxy revolution with VeTek Semiconductor's LED EPI Susceptor – the trusted solution for superior LED growth.

Basic physical properties of TaC coating:

Physical properties of TaC coating
Density	14.3 (g/cm³)
Specific emissivity	0.3
Thermal expansion coefficient	6.3 10-6/K
Hardness (HK)	2000 HK
Resistance	1×10-5 Ohm*cm
Thermal stability	<2500℃
Graphite size changes	-10~-20um
Coating thickness	≥20um typical value (35um±10um)