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China Silicon Carbide Ceramics Manufacturer, Supplier, Factory

VeTek Semiconductor is your innovative partner in the field of semiconductor processing. With our extensive portfolio of semiconductor-grade Silicon Carbide Ceramics material combinations, component manufacturing capabilities, and application engineering services, we can help you overcome significant challenges. Engineering technical Silicon Carbide Ceramics are widely applied in the semiconductor industry due to their exceptional material performance. VeTek Semiconductor's ultra-pure Silicon Carbide Ceramics are frequently used throughout the entire cycle of semiconductor manufacturing and processing.


DIFFUSION & LPCVD PROCESSING

VeTek Semiconductor provides engineered ceramics components specifically designed for batch diffusion and LPCVD requirements including:

• Baffles & holders
• Injectors
• Liners & process tubes
• Silicon Carbide Cantilever Paddles
• Wafer boats and pedestals


ETCH PROCESS COMPONENTS

Minimize contamination and unscheduled maintenance with high- purity components engineered for the rigors of plasma etch processing, including:

Focus rings

Nozzles

Shields

Showerheads

Windows / Lids

Other custom components


RAPID THERMAL PROCESSING & EPITAXIAL PROCESS COMPONENTS

VeTek Semiconductor provides advanced material components tailored for high-temperature thermal processing applications in the semiconductor industry. These applications encompass RTP, Epi processes, diffusion, oxidation, and annealing. Our technical ceramics are designed to withstand thermal shocks, delivering reliable and consistent performance. With VeTek Semiconductor's components, semiconductor manufacturers can achieve efficient and high-quality thermal processing, contributing to the overall success of semiconductor production.

• Diffusers

• Insulators

• Susceptors

• Other custom thermal components


Physical properties of Recrystallized Silicon Carbide
Property Typical Value
Working temperature (°C) 1600°C (with oxygen), 1700°C (reducing environment)
SiC / SiC content > 99.96%
Si / Free Si content < 0.1%
Bulk density 2.60-2.70 g/cm3
Apparent porosity < 16%
Compression strength > 600 MPa
Cold bending strength 80-90 MPa (20°C)
Hot bending strength 90-100 MPa (1400°C)
Thermal expansion @1500°C 4.70 10-6/°C
Thermal conductivity @1200°C 23  W/m•K
Elastic modulus 240 GPa
Thermal shock resistance Extremely good


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High Purity SiC Cantilever Paddle

High Purity SiC Cantilever Paddle

VeTek Semiconductor is a leading manufacturer and innovator of High Purity SiC Cantilever Paddle in China. High Purity SiC Cantilever Paddles are commonly used in semiconductor diffusion furnaces as wafer transfer or loading platforms. VeTek Semiconductor is committed to providing advanced technology and product solutions for the semiconductor industry. We look forward to becoming your long-term partner in China.

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Vertical Column Wafer Boat & Pedestal

Vertical Column Wafer Boat & Pedestal

As a professional Vertical Column Wafer Boat & Pedestal manufacturer and supplier in China, Vetek Semiconductor's Vertical Column Wafer Boat & Pedestal is made of high-purity quartz or silicon carbon ceramic (SiC) materials, with excellent high temperature resistance, chemical stability and mechanical strength, and is an indispensable core component in the semiconductor manufacturing process. Welcome to your further consultation.

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Contiguous Wafer Boat

Contiguous Wafer Boat

Vetek Semiconductor Contiguous Wafer Boat is an advanced equipment for semiconductor processing. The product structure of Contiguous Wafer Boat is carefully designed to ensure efficient processing and production of precision wafers. Vetek Semiconductor is committed to providing excellent technology and product solutions for the semiconductor industry. We look forward to becoming your long-term partner in China.

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Silicon On Insulator Wafer

Silicon On Insulator Wafer

VeTek Semiconductor is a professional Chinese manufacturer of Silicon On Insulator Wafer, ALD Planetary Base, and TaC Coated Graphite Base. VeTek Semiconductor's Silicon On Insulator Wafer is an important semiconductor substrate material, and its excellent product characteristics make it play a key role in high-performance, low-power, high-integration and RF applications. We look forward to further cooperation with you.

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Horizontal SiC Wafer Carrier

Horizontal SiC Wafer Carrier

VeTek Semiconductor is a professional manufacturer and supplier of TaC coated guide ring, horizontal SiC wafer carrier, and SiC coated susceptors in China. We are committed to providing perfect technical support and ultimate product solutions for the semiconductor industry. Welcome to contact us.

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SiC Wafer Boat

SiC Wafer Boat

VeTek Semiconductor's SiC Wafer Boat is a very high performance product. Our SiC Wafer Boat is usually used in semiconductor oxidation diffusion furnaces to ensure that the temperature is evenly distributed on the wafer and improve the silicon wafer processing quality. The high temperature stability and high thermal conductivity of SiC materials ensure efficient and reliable semiconductor processing. We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.

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As a professional Silicon Carbide Ceramics manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Silicon Carbide Ceramics made in China, you can leave us a message.
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